Статья: Uncooled 160×120 microbolometer IR FPA based on sol-gel VO
The technology of high-quality microbolometer focal plane arrays (FPA) fabrication has been developed. Simple and
cheap sol-gel technology of thermosensitive vanadium oxide layers preparation is underlain in its basis. Uncooled
160х120 microbolometer sensor assemblies for 8-14 microns spectral range have been fabricated. The paper brief
outlines simple techniques to measure crosstalk, precision of FPA temperature stabilization and sensor assembly
response time to infrared signal change. The noise equivalent temperature difference better than 100 mK has been
achieved at frame rate 60 Hz and F/1 optics
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